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plasma 88 slot In slot antenna type plasma sources the microwave power is coupled from an annual waveguide through equidistantly positioned resonant

The slot length for a resonance frequency of 2 GHz is approximately mm This allows generating voltages high enough for ignition of an atmospheric plasma plasma 888 After that, the slots were etched μm deep into the top cladding with the inductively coupled plasma reactive ion etching process

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plasma 88 slot
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plasma 88 slot In slot antenna type plasma sources the microwave power is coupled from an annual waveguide through equidistantly positioned resonant

plasma 88 slot The slot length for a resonance frequency of 2 GHz is approximately mm This allows generating voltages high enough for ignition of an atmospheric plasma

After that, the slots were etched μm deep into the top cladding with the inductively coupled plasma reactive ion etching process